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1 Introduction Several tests have been done in the QWR cavity sputtering system since the system was established in 2009.The sputtering system is checked out in these tests and the uniformity of sputtered film is measured also.
1 Introduction Several tests have been done in the QWR cavity sputtering system since the system was established in. The sputtering system is checked out in these tests and the uniformity of sputtered film is also measured.