一、前言从各种电子材料的分析中,本文拟就硅半导体、化合物半导体有关的分析作一综述。在半导体工业领域,当前需要研究的课题有以下几个方面。与器件有关的有:逻辑元件高速化,存储元件超高集成化,光电元件高性能化,研制以新概念为基础的新型器件等;与工艺有关的有:欲达到上述目的的微加工技术以及与其相应的净化技术,高纯预处理技术等;与单晶、 I. Preface From the analysis of various electronic materials, this article intends to review the relevant analysis of silicon semiconductors and compound semiconductors. In the field of semiconductor industry, the current need to study the following aspects. Device-related: high-speed logic components, high-density storage elements, high-performance photovoltaic cells, the development of new concepts based on a new type of device; and technology are: to achieve the above purpose of micro-machining technology and With its corresponding purification technology, high-purity pretreatment technology; and single crystal,