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用酒精和氢气的混合气体为工作气体 ,在不同的酒精浓度下 (1 0 % ,1 5% ,2 0 % )下利用微波等离子体化学气相沉积法在较低温度下 (450～ 50 0℃ )以单晶硅为衬底制备出类金刚石薄膜样品。 Raman光谱分析了酒精浓度对薄膜中金刚石成份的含量的影响。红外光谱分析表明薄膜的红外光透过率与薄膜的表面形貌、薄膜结构有关。酒精浓度为 1 0 %时得到的金刚石薄膜的红外光透过率最高 ,达到 62～ 72 % ,同时透过率曲线因薄膜干涉而引起的振荡也最为显著。
A mixed gas of alcohol and hydrogen was used as working gas at different temperatures (450 ~ 500 ℃) under microwave plasma chemical vapor deposition under different alcohol concentrations (10%, 15%, 20% ) Diamond-like carbon film samples were prepared on monocrystalline silicon substrate. Raman spectroscopy analysis of the alcohol concentration on the film diamond content. Infrared spectrum analysis shows that the infrared transmittance of the film is related to the surface morphology of the film and the structure of the film. When the concentration of alcohol is 10%, the diamond film has the highest infrared light transmittance of 62-72%, and the transmittance curve is the most prominent due to the film interference.