论文部分内容阅读
利用刚性球体压入法测定了（Ｔｉ，Ａｌ）Ｎ薄膜的表面脆性。试验结果表明：随着薄膜中Ａｌ含量的增加（Ｔｉ，Ａｌ）Ｎ薄膜的表面脆性不断降低，当Ａｌ含量在２２．５％～３０％的范围内时薄膜的表面脆性最低，此后随着Ａｌ含量的进一步增加薄膜的表面脆性又呈上升的趋势。对薄膜中的残余应力的计算结果表明，随着Ａｌ含量的增加，残余应力呈先降后升的趋势。基于薄膜中残余应力的变化，合理地解释了Ａｌ含量对（Ｔｉ，Ａｌ）Ｎ薄膜表面脆性的影响。
The surface brittleness of (Ti, Al) N thin films was measured by a rigid ball press-in method. The experimental results show that the surface brittleness of (Ti, Al) N thin films decreases with the increase of Al content in the films, and the surface brittleness is the lowest when Al content is in the range of 22.5% ~ 30% Further increase in the content of the surface of the film brittleness has shown an upward trend. The calculated residual stress in the film shows that the residual stress decreases first and then increases with the increase of Al content. Based on the change of residual stress in the film, the effect of Al content on the surface brittleness of (Ti, Al) N thin film is reasonably explained.