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本文利用激光剥离超导靶材的技术,在相当低的基片温度下,原位生长出了零电阻温度90K左右、C-轴取向择优生长的Y-Ba-Cu-O超导薄膜;给出了激光剥离材料的新模型;推导了激光剥离材料的功率密度阈值、剥离层厚度和被剥离而喷射出来的粒子所受到的反冲压的数学表达式.
In this paper, Y-Ba-Cu-O superconducting thin films with in-situ growth of about 90K at zero-resistance temperature and C-axis orientation were grown at relatively low substrate temperature by laser ablation of superconducting targets. A new model of laser lift-off material was developed. The mathematical expression of the power density threshold of the laser lift-off material, the thickness of the lift-off layer and the recoil pressure of the sprayed particles were obtained.