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提出了一种增强量子阱红外探测器耦合效率的双面金属光栅结构。采用三维时域有限差分算法(3D-FDTD)对GaAs/AlGaAs量子阱红外探测器双面结构金属光栅进行了仿真分析。通过对比不同周期、占空比、金属层厚度结构参数下探测器的电场分布及相对耦合效率,确定了4.8μm探测器优化的双面金属光栅结构。与顶部和底部单层金属光栅结构比较,双面金属光栅结构探测器相对耦合效率提高到3倍以上。探测器相对耦合效率随光栅周期变化的双峰曲线特性体现了双面金属光栅结构在双色量子阱红外探测器光耦合方面的潜力。同时该结构还可以应用于单色、双色及多色量子阱焦平面红外探测器。
A double-sided metal grating structure is proposed to enhance the coupling efficiency of quantum well infrared detectors. The three-dimensional finite difference time domain (3D-FDTD) method was used to simulate the double-sided metal grating of GaAs / AlGaAs quantum well infrared detectors. By comparing the electric field distribution and the relative coupling efficiency of the detector with different period, duty cycle and thickness parameters of the metal layer, the double-sided metal grating structure with 4.8μm detector was determined. Compared with the top and bottom single-layer metal grating structure, the relative coupling efficiency of the double-sided metal grating structure detector increases more than 3 times. The bimodal characteristic of the relative coupling efficiency of the detector with the change of the grating period shows the potential of the double-sided metal grating structure in the optical coupling of the two-color quantum well infrared detector. At the same time the structure can also be applied to monochromatic, two-color and multi-color quantum well focal plane infrared detector.