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We report on stacking fault (SF) detection in free-standing cubic-SiC epilayer by the Raman measurements.
,Raman Scattering Detection of Stacking Faults in Free-Standing Cubic-SiC Epilayer
【摘 要】
：
We report on stacking fault (SF) detection in free-standing cubic-SiC epilayer by the Raman measurements.
【作 者】
：
【机 构】
：
Novel Semiconductor Material Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, B
【出 处】
：
中国物理快报（英文版）
【发表日期】
：
2006年10期
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