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对多线和多叶型电极系统产生的电位分布进行数学运算,给出了满足各多极场误差项为零时的几何参数和电参数的一般解,提出了组合四极场和八极场的三种电极结构。采用较多的线和叶使得在场的完整性、扩大可工作区域、提高“电压利用率”和修正象差等方面较十二线、八叶、十二叶等结构有所改进。可用在某些类型的加速器的离子输出口作为一种新型结构的电四极场聚焦系统。其特点是电极加工简单,占用空间小和不易产生电击穿现象。也可在电子束固化装置中作为线聚焦静电四极透镜,以提高试样表面束流强度的不均匀性。
The mathematical expressions of the potential distributions generated by the multi-line and multi-lobe electrode systems are given. The general solutions to the geometrical and electrical parameters of the multi-polar and multi-lobed systems are given. The combined quadrupole and octupole fields The three electrode structure. The use of more lines and leaves improved the presence of the presence, the expandable workable area, the improvement of “voltage utilization” and the correction of aberrations compared with the 12th, 8th and 12th leaves structures. The ion output port of some types of accelerators can be used as a new type of electrical quadrupole focusing system. It is characterized by simple electrode processing, small footprint and difficult to produce electrical breakdown phenomena. Electron beam curing device can also be used as a line focused electrostatic quadrupole lens in order to improve the sample surface beam intensity of non-uniformity.