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用温度梯度法( Temperature Gradient Technique ,简称温梯法或 T G T 法) ,定向籽晶[0001] 方向,生长出110mm ×80m m Al2 O3 单晶,晶体完整、透明。采用硼酸钠玻璃液作为 Al2 O3 晶体的化学抛光和化学腐蚀剂,观察了晶体不同部位处(0001) 、(1120) 晶片的化学腐蚀形貌相,(0001) 切片的位错腐蚀坑呈三角形,位错密度为2 ×103 ~3 ×103/cm2 ;(1120) 切片位错腐蚀坑呈菱形,位错密度为7×103 ~8 ×103/cm2 ;而且等径生长部位的完整性比放肩处高。利用同步辐射 X 射线白光衍射实验分析了(0001) 晶片的(2021) ,(1101) 和(0221) 衍射面内的位错组态。确定了两组位错线的 Burgers矢量,温梯法生长的 Al2 O3 晶体中的位错主要是刃型位错。
With the temperature gradient method (Temperature Gradient Technique, referred to as the temperature gradient method or T G T method), oriented seed crystal [0001] direction, grow 110mm × 80m m Al2O3 single crystal, the crystal is complete and transparent. The chemical etching morphology of (0001) and (1120) wafers at different positions of the crystal was observed by using sodium borate glass as chemical polishing and chemical etchant for Al 2 O 3 crystal. The dislocation pit of (0001) The error density is 2 × 103 ~ 3 × 103 / cm2. (1120) The slice dislocation corrosion pit is rhombus, the dislocation density is 7 × 103 ~ 8 × 103 / cm2. high. Dislocation configurations in (2021), (1101) and (0221) diffractive surfaces of (0001) wafers were analyzed using synchrotron radiation X-ray white light diffraction experiments. The Burgers vectors of two groups of dislocation lines were determined. The dislocations in the Al 2 O 3 crystal grown by the temperature gradient method are mainly edge dislocations.