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本文介绍了一种新颖的利用激光化学汽相沉积（ＬＣＶ）球面微透镜的技术。我们建立了一套ＬＣＶＤ的实验装置，用该装置在平面石英玻璃衬底上，成功地沉积生成了平凸型氨化硅球面微透镜。同时，还对沉积成的微透镜的参量进行了测试。在实验中还摸索了ＬＣＶＤ的沉积工艺。实验结果表明，通过控制源气体的化学配比与浓度，调节激光功率与衬底上的聚焦激光光斑尺寸，选择沉积时间，可以获得不同直径、透明、表面光滑的平凸型氮化硅球面微透镜。
This article describes a novel technique utilizing laser chemical vapor deposition (LCV) spherical microlenses. We have established a set of LCVD experimental device, the device deposited on a flat quartz glass substrate, successfully deposited to produce a flat convex type ammoniated spherical microlenses. At the same time, the deposited micro-lens parameters were also tested. In the experiment also explored the LCVD deposition process. The experimental results show that by controlling the stoichiometry and concentration of the source gas, adjusting the laser power and the size of the focused laser spot on the substrate, and selecting the deposition time, it is possible to obtain a flattened-type silicon nitride sphere with different diameters, transparent and smooth surface lens.