主要研究了一种适用于微加工工艺的纳米多孔铜(NPC)制备方法。采用酸性柠檬酸铜锌电镀体系制备出Cu68Zn32前驱合金,通过改变前驱合金在盐酸中去合金的时间可以对NPC的微观形貌及孔径分布进行有效控制。研究结果表明,在0.05 mol/L的盐酸中腐蚀6 h后制备的NPC孔径为80~120 nm,而系带尺寸为20~40 nm,利用BET法测得其比表面积为8.12 m2/g。另外,应用微加工工艺制备出边长为50μm方形微阵列,验证了该NPC制备工艺与微加工工艺有较好的兼容性,为NPC的图形化与集成制造提供一种有效的工艺方案。 The main research is the preparation of nano-porous copper (NPC) suitable for micro-fabrication process. Cu68Zn32 precursor alloy was prepared by acidic citric acid copper-zinc electroplating system. The microscopic morphology and pore size distribution of NPC can be effectively controlled by changing the time of de-alloying the precursor alloy in hydrochloric acid. The results showed that the diameter of the NPC prepared after etching for 6 h in 0.05 mol / L hydrochloric acid was 80 ~ 120 nm and the tether size was 20 ~ 40 nm. The BET surface area was 8.12 m2 / g. In addition, a square micro-array with a side length of 50 μm was prepared by using a micro-fabrication process, which verified that the preparation process of the NPC has good compatibility with the micro-fabrication process and provides an effective process scheme for NPC’s graphical and integrated manufacturing.