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许多年来,超声检验已广泛用作无损检验的一个手段。对于大多数大型结构,由于受有限的频率范围(1～10MHz)限制,无法检测宏观缺陷。 随着材料技术的进展,需要研制高分辨率的无损检测设备。近年来,扫描激光声学显微镜研制成功,并开始进入实用阶段。扫描激光声学显微镜(SLAM)是一种高频超声映象装置,它可以使在光学上不透明材料的内部产生放大的图象。它具有10～500MHz的广阔的频率范围,能够检验大型零件的内部缺陷,也可以用于小型零件的探测。由于高频范围,使显微镜结构探测进入微观范围。高频能力可使扫描激光声学
For many years, ultrasonic testing has been widely used as a means of non-destructive testing. For most large structures, macroscopic defects can not be detected due to the limited frequency range (1 to 10 MHz). With advances in materials technology, the need to develop high-resolution non-destructive testing equipment. In recent years, the successful development of scanning laser acoustic microscope, and began to enter the practical stage. Scanning Laser Acoustic Microscopy (SLAM) is a high-frequency ultrasound imaging device that produces an enlarged image of the interior of an optically opaque material. It has a wide frequency range of 10 ~ 500MHz, able to test the internal defects of large parts, can also be used for small parts of the detection. Due to the high frequency range, the microscope structure is probed into the microscopic range. High-frequency capability enables scanning laser acoustics