研究了一种Fizeau型偏振移相干涉仪。以中心波长为650nm的多纵模半导体激光器作为光源,利用光源的短相干特性和一套偏振延迟装置分出一对偏振方向正交的参考光和测试光,采用巴比涅-索列尔补偿器作为偏振移相器。测试了一块平行平板的前表面面形,面形PV值为0.0682λ,RMS值为0.0127λ。该方法的优点是移相精度高,移相时无须推动参考镜,适用于大口径光学系统的干涉测试,可消除多表面干涉杂散条纹的影响。 A kind of Fizeau polarization phase shift interferometer was studied. A multi-longitudinal mode semiconductor laser with a center wavelength of 650 nm is used as a light source. A pair of polarization delay devices are used to separate a pair of reference light and test light orthogonal to the polarization direction by using the short coherence property of the light source and a test beam, As a polarization phase shifter. The shape of the front surface of a parallel plate was tested. The PV of the surface was 0.0682λ and the RMS value was 0.0127λ. The method has the advantages of high phase shift precision, no need to push the reference mirror during the phase shift, and is suitable for the interference test of a large-aperture optical system, and can eliminate the influence of stray fringes with multi-surface interference.