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由微型燃烧器、微型压缩机和涡轮组成的微型气体涡轮发动机有望成为微机电系统的能源系统,阐述了一种微型燃烧器的设计和加工,设计时力图增加流路的长度,其目的是减少微型燃烧腔的热损失和有效地对燃料和空气进行预热,该微型燃烧器由7片厚度不同的单晶硅片组成,通过ICP DRIE干刻蚀加工而成.组装后的微燃烧器的样件尺寸为21.5 mm×21.5 mm×4.4 mm,已成功地进行了氢气燃烧实验和测试.该微型燃烧器和转子组合后可以应用于微型气体涡轮发动机,与压电元件组合后可用于微型发电机。
Micro gas turbine engines consisting of micro-combustors, micro-compressors and turbines are expected to become energy systems for micro-electromechanical systems. The design and processing of a micro-combustor are described with the aim of increasing the length of the flow path with the aim of reducing Micro-combustion chamber heat loss and effectively preheat the fuel and air, the micro-burner consists of seven different thickness of monocrystalline silicon wafer by ICP DRIE dry etching from the assembled micro-burner The sample size is 21.5 mm × 21.5 mm × 4.4 mm and hydrogen combustion experiments and tests have been successfully performed.This micro combustor and rotor combination can be applied to micro gas turbine engines and combined with piezoelectric elements for micro power generation machine.