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自动分步重复照相机,是半导体电子工业的专用设备,在固体组件,大规模集成电路等生产过程中用于制造光刻工序所需要的掩模。本设备采用了激光干涉测量技术和闭环数字控制系统,因此具有定位精度高,操作过程自动化的特点。在操作面板上只要将步距、每行的步数以及行数、曝光时间设置好以后,启动机器,由数字控制系统实行控制自动完成工作。技术指标: 1.工作台定位精度:≤±1μ 2.工作台行程:60×60毫米 3.工作台运动速度: 快速:30毫米/分慢速:3毫米/分 4.步距:0.3毫米—8毫米,最小调节量为0.79μ 5.步数、行数:各为1～31
Automatic step-and-repeat cameras are specialized devices for the semiconductor electronics industry that are used to create the masks needed for lithography processes in the production of solid state components, large scale integrated circuits, and the like. The device uses laser interferometry technology and closed-loop digital control system, so with high positioning accuracy, the operation of automated features. As long as the step on the operation panel, the number of steps per line and the number of rows, the exposure time is set, start the machine, the digital control system implementation of the control automatically complete the work. Technical Specifications: 1. Table positioning accuracy: ≤ ± 1μ 2. Table stroke: 60 × 60 mm 3. Table movement speed: Fast: 30 mm / min Slow: 3 mm / min 4. Step: 0.3 mm -8 mm, the minimum adjustment of 0.79μ 5. Steps, the number of rows: each 1 ~ 31