传统的毛细管电泳芯片基体材料以硅和玻璃为主 ,成本较高 ,且不适合于生化领域。而以聚合物作为基片材料 ,由于材料成本较低 ,且微复制方法成本也很低 ,因此可望在商业上取得广泛的应用。采用DEM技术 ,利用感应偶合等离子体 (ICP)刻蚀设备进行硅的刻蚀 ,然后从硅片直接进行微电铸 ,得到金属模具后 ,再利用微复制工艺 ,最终得到的毛细管电泳芯片基片 ,该技术工艺简单 ,可实现大批量低成本生产 ,预期将有广阔的应用前景 The traditional capillary electrophoresis chip base material is silicon and glass, high cost, and not suitable for biochemical field. The polymer as a substrate material, due to the lower cost of materials, and microduplication method is also very low cost, it is expected to obtain a wide range of commercial applications. Using DEM technology, the silicon is etched by using an inductively coupled plasma (ICP) etching equipment, and then the micro-electroforming is performed directly from the silicon wafer to obtain the metal mold, and then the micro-replication process is used to finally obtain the capillary electrophoresis chip substrate , The technology is simple, high-volume low-cost production can be achieved, is expected to have broad application prospects