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近年来筒镜电子能量分析器广泛应用于俄歇电子能谱仪和光电子能谱仪。这种静电聚焦型分析器是由内外两个同轴圆筒组成的(见图1)。电子发射源放在两圆筒的同心轴线上。在内圆筒上切割一环形狭缝,环平面垂直于圆筒的轴线。如果电子源和内圆筒同电位,电子束将以直线射到分析器的入口狭缝而进入电场区。适当调节内外圆筒的电位差,具有某一单能量的电子将被偏转通过出口狭缝(切割方法同入口狭缝)进入内圆筒并聚焦于轴线上一点。
In recent years, cylindrical electron microscope energy analyzer is widely used in Auger electron spectrometer and photoelectron spectrometer. This electrostatic focus analyzer is composed of two coaxial cylinders inside and outside (see Figure 1). The electron emission source is placed on the concentric axis of both cylinders. A circular slit is cut in the inner cylinder, the ring plane being perpendicular to the axis of the cylinder. If the electron source and the inner cylinder are at the same potential, the electron beam will strike the entrance slit of the analyzer in a straight line and enter the electric field region. With proper adjustment of the potential difference between the inner cylinder and the outer cylinder, electrons with a certain single energy will be deflected through the exit slit (cutting method with entrance slit) into the inner cylinder and focus on the axis.