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在溅射或蒸镀半导体薄膜、冶金精炼、气体激光管的制造等所应用的真空系统中,都需要首先抽到约10~(-4)帕(约10~(-6)托)的高真空,然后引入氩、氮、氢、氦或氖等纯气体到10~(-1) -10~2帕(约l0~(-3)—1托)的高压范围,某些场合还要求所充气体的压强测量值有一定的精度。全量程为1.33×10~(-4)-1.33×1O~2帕(1×10~(-6)-1托,测氮压值)的DL-8型高-压强电离真空规(以下简称DL-8规)能够满足这些需要。由于DL-8规的电极结构和工作电参量与其它类型的电离规不同,其测量氩、氢、氖和氦等气体压强相对于
In vacuum systems such as sputtering or vapor deposition of semiconductor thin films, metallurgical refining, gas laser tubes, and the like, it is necessary to first pump in a vacuum of about 10 -4 Pa (about 10 -6 Torr) Vacuum, and then introduce pure gas such as argon, nitrogen, hydrogen, helium or neon to a high pressure range of 10-1 -10-2Pa (about 10-3 torr), in some cases, it also requires Inflatable body pressure measurement has a certain accuracy. The DL-8 high-pressure ionization vacuum gauge (hereinafter referred to as “the”) has a full range of 1.33 × 10 -4 -1.33 × 10 -2 Pa (1 × 10 -6 torr, DL-8 gauge) to meet these needs. As the electrode structure and working electrical parameters of DL-8 gauge are different from those of other types of ionization gauges, it measures the pressure of gas such as argon, hydrogen, neon and helium relative to