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介绍PSD激光测微仪的结构及特点。根据输入输出参数方程及误差测量结果进行数据处理和误差分离,确定了仪器的系统误差和随机误差。这一工作为系统误差补偿和提高仪器测量精度提供了依据。
Introduce the structure and characteristics of PSD laser micrometer. According to the equation of input and output parameters and error measurement results, the data processing and error separation are carried out, and the systematic errors and random errors of the instrument are determined. This work provides a basis for system error compensation and improve the measurement accuracy of the instrument.