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提出了利用多层膜聚光镜提高Schwarzschild显微镜成像均匀性的方法。设计了聚光镜的光学结构,使80%的等离子体辐射能量会聚在约0.8 mm直径的范围内。根据成像系统的工作波长和光线在聚光镜表面的入射角度,设计了Mo/Si周期多层膜,制备了聚光镜光学元件,膜层周期厚度为9.64 nm,周期数为30,对18.2 nm波长的峰值反射率为51.7%。利用所设计的聚光镜作为照明系统,对Schwarzschild物镜进行了网格成像实验。结果表明:在1.2 mm视场内可以实现2.5μm的空间分辨力,并且完全消除了物镜中心遮拦所造成的像面光强分布不均匀性。
A method to improve the imaging uniformity of Schwarzschild microscope by using multilayer film condenser is proposed. The optical structure of the condenser is designed so that 80% of the plasma radiant energy converges in the range of about 0.8 mm in diameter. According to the working wavelength of the imaging system and the incident angle of the light on the surface of the condenser lens, a Mo / Si periodic multilayer film was designed and the condenser optical element was fabricated. The thickness of the film was 9.64 nm and the number of cycles was 30. The peak wavelength of 18.2 nm Reflectivity was 51.7%. The Schwarzschild objective was meshed using the designed condenser as a lighting system. The results show that the spatial resolution of 2.5 μm can be achieved within 1.2 mm field of view, and the nonuniform distribution of light intensity caused by the obstruction of the objective lens is completely eliminated.