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分析了可控硅中频电源在运行中发生停振的原因,提出了解决停振的方法。实践表明,采用该方法能使中频电源长期稳定运行,满足工艺要求。
The reason why the SCR mid-frequency power supply stops in operation is analyzed, and the method of stopping the vibration is proposed. Practice shows that using this method can make long-term stable operation of IF power supply to meet the process requirements.