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在微电子器件制造过程中,玻璃与石英加工乃是器件工艺中不可缺少的一个重要环节,而喷灯则是玻璃、石英仪器加工不可缺少的主要工具之一。一个工件完成得好坏与使用的喷灯火焰有很大的关系。使用多层氢氧喷灯加工玻璃和石英仪器比用其它类型的多孔喷灯要方便。它与其它类型的多孔喷灯比较起来,具有下述的优点:(1)完成整套复杂仪器的加工时,要求随时调换火焰大小。若用其它多孔喷灯,则需要随时更换大小灯。而使用多层氢氧喷灯,就不必更换灯,只调节氢氧气两个调节活栓就可以改变灯的火焰,这样工作起来既方便又迅速。(2)体积小,结构紧凑,功率大。(3)可以事先估计好喷灯氢氧气流汇聚点的高低和氢氧喷口的面积。氢氧喷口的面积比例为:1:6～l:8。但不等于氢氧气流量比。若氧气过量,非但温度不能高,反而降低温度。(4)无论是单调节还是氧多层调节喷灯,氢氧喷口面积的比例受到加工的限制,而不
In the process of manufacturing microelectronic devices, glass and quartz processing are indispensable and important parts of the device technology. And the torch is one of the indispensable tools for processing glass and quartz instruments. A work piece is good or bad and has a great relationship with the use of torch flame. Glass and quartz instrumentation are more convenient than using other types of perforated torches with multilayered oxyfuels. Compared with other types of multi-hole torch, it has the following advantages: (1) complete set of complex instruments processing, requires the exchange of flame size at any time. If other porous blowtorch, you need to change the size of light. The use of multi-layer hydrogen injection torch, you do not have to replace the lamp, only adjust the two hydrogen and oxygen regulation of the bolt can change the light of the flame, it is both easy and quick to work. (2) small size, compact structure, high power. (3) It can be estimated in advance good torch hydrogen and oxygen flow convergence point of the level of hydrogen and oxygen nozzle area. The proportion of the area of the oxygen nozzle: 1: 6 ~ l: 8. But not equal to the ratio of hydrogen and oxygen flow. If the oxygen is excessive, not only the temperature can not be high, but lower the temperature. (4) Whether single or multi-layer adjustment of oxygen torch, the ratio of hydrogen nozzle area is limited by processing, and not