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为提高光学标准球形状误差测量准确度,提出了一种基于单转位特征角的圆度误差分离方法。本文方法基于严格的数学原理,利用特征角在形状比较中参照作用,可完全回避开可能产生谐波抑制的所有“盲点”;通过一次转位,并分别将转位前后的采样数据进行傅里叶变换,在频域中实现光学标准球圆度误差和主轴径向回转误差的分离,再将分离后的数据变换到时域,可以在使分离后的信号在进入滤波器之前无任何信号损失,使得建模过程无任何原理误差,实现主轴径向回转误差和光学标准器圆度误差的完全分离。实验表明,当每周采样点数为1 024、转位特征角为21.09′时,分离后圆度误差包含所有频次的谐波,无任何谐波抑制,表明光学标准球圆度误差与仪器主轴的回转误差得到严格分离。本文方法不仅可以用于超精密级光学标准球的圆度测量,而且可用于建立精度水平最高的理想的基/标准级圆度测量系统。
In order to improve the accuracy of optical standard ball shape error measurement, a roundness error separation method based on single-turn feature angle is proposed. Based on the strict mathematical principle, this method can completely avoid all “blind spots ” which may cause harmonic suppression by using the reference angle of the characteristic angle in the shape comparison. Through the first indexing and the sampling data before and after the indexing Fourier transform to separate the optical standard roundness error and the spindle radial gyro error in the frequency domain and then transform the separated data to the time domain so that the separated signal will not have any signal before entering the filter Signal loss, making the modeling process without any principle error, to achieve the spindle radial rotation error and optical standard roundness error completely separated. Experiments show that when the number of sampling points per week is 1 024 and the transposition characteristic angle is 21.09 ’, the roundness error after the separation contains all harmonics of the frequency without any harmonic suppression, indicating that the error between the optical standard roundness and the principal axis Swing error is strictly separated. This method can be used not only for measuring the roundness of ultra-precision optical standard balls, but also for creating the ideal base / standard roundness measurement system with the highest level of accuracy.