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本文扼要地介绍了三束同步混合注入装置,给出离子束源、原子束源和电子束源的设计和调试结果,还给出三束动态混合调试结果及初步开展的动态混合离子注入工艺开发与应用情况。三束同步处理和电子束的活化作用是该装置的主要特点。
In this paper, three hybrid devices are introduced briefly. The design and test results of ion beam source, atomic beam source and electron beam source are given. The results of three hybrid dynamic tuning and the preliminary development of dynamic hybrid ion implantation And the application. The three beam synchronization and electron beam activation are the main features of the device.