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用离子束辅助沉积方法合成Ｆｅ－Ｎ薄膜，用离子束背散射和Ｘ射线衍射方法分析薄膜成分和结构．结果表明，薄膜的组分（α－Ｆｅ，ζ－Ｆｅ２Ｎ，ε－Ｆｅ（２－３）Ｎ，γ＇－Ｆｅ４Ｎ相等）取决于沉积参数。给出了沉积温度和Ｎ／Ｆｅ原子到达比组成的相区域图．
Fe-N thin films were synthesized by ion-beam-assisted deposition. The composition and structure of the thin films were analyzed by ion beam backscatter and X-ray diffraction. The results show that the composition of the films (α-Fe, ζ-Fe2N, ε-Fe (2-3) N, γ’-Fe4N) is dependent on the deposition parameters. The phase diagram of deposition temperature and N / Fe atomic arrival ratio composition is given.