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本文通过优化晶体弯曲过程的旋转点 ,理论上分析了弧矢聚焦晶体弯曲原理、弯曲所造成的系统误差以及弯曲过程中晶体面形精度的变化 ;介绍了以柔性铰链为基本单元的精密工作台弯曲晶体的工作原理及其造成的系统误差
In this paper, the bending principle of sagittal focusing lens, the systematic errors caused by bending and the variation of the surface shape accuracy during bending are theoretically analyzed through the optimization of the rotation point of the crystal bending process. The precision table with flexible hinge as the basic unit is introduced The working principle of the bent crystal and the system error caused by it