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对悬臂梁微机械光开关的机电特性进行了理论分析 .利用机械和电学特性 ,导出了悬臂梁的弯曲量和所加的电压的解析关系 ,并给出了阈值电压的计算公式 .指出外加电压与梁的宽度无关 ,与梁的长度的平方成反比 .悬臂梁尖端的弯曲量不能超出相邻电极间距的 1/ 3.这些结论是悬臂梁微机械光开关设计和研制的直接依据
The mechanical and electrical characteristics of the cantilever micro-mechanical optical switch are analyzed theoretically.The analytical relationship between the bending quantity of the cantilever beam and the applied voltage is deduced by using the mechanical and electrical characteristics, and the calculation formula of the threshold voltage is given. Irrespective of the width of the beam and inversely proportional to the square of the length of the beam.The bending amount of the tip of the cantilever beam can not exceed 1/3 of the distance between adjacent electrodes These conclusions are the direct basis for the design and development of cantilever micro-mechanical optical switch