We have been developing new fabrication tools based on optical radiation pressure and related phenomena to develop a flexible and accurate microfabrication technology. In this paper, the laser trapping probe for the nano-CMM for assessment, in addition to micromachining technique using a small particle controlled by optical radiation pressure and laser aggregation technique are discussed. As the positional detection probe for the nano-CMM, an optically trapped silica particle with 8 mm diameter in forced oscillation state is used. A probe sphere retains a stable position when applied with trapping force by Nd:YAG laser light formed annular and is forced to oscillate by the driving force changed by modulating the intensity of LD emission. Experintal results show that this vibrational microprobe has the possibility to achieve positional sensing accuracy of less than 25 nm. As a new micromachining technique, nano-removal process using an optically trapped micro-grain is proposed. The laser trapping force enables not only to stably trap the diamond grain with asymmetrical shape but also to freely control the position with spinning. Using this micro machining tool, the machining experiments of hydrocarbon film are performed. AFM observation confirmed that the fine groove with depths of about 3～4 nm can be fabricated. As an additive process based on radiation pressure, a laser microstructure fabrication using laser agglomeration phenomena of colloidal particles aided by radiation pressure is investigated. By controlling laser beam scanning in slurry containing KOH solution and SiO2 particles with a diameter of 140 nm, colloidal particles are aggregated and adhered firmly to a silicon wafer substrate. Using this laser agglomerating process, two-dimensional grid microstructures at the pitch of 5 mm can be fabricated.