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一、引言化学气相沉积(CVD)技术和物理气相沉积(PVD)技术得到了迅速的发展,提供了抗摩擦磨损涂层的新前景。应用于以磨料磨损为主的情况,TiC涂层较好,应用于以擦伤为主的情况,TiN涂层较好,应用于需要高温稳定的情况,Al_2O_3涂层较好。例如CVDTiN涂层的高速钢刀具和模具的寿命分别为未涂层的3～6倍,CVD Al_2O_3涂层的硬质合金(P30)刀具,切削铸铁和高碳钢时,其寿命为涂TiC刀具的2倍,为未涂层刀具的10倍。硬质合金的CVD涂层开始只有TiC单层,发展到TiC-TiN双涂以及TiC-TiN-Al_2O_3三重涂层等。CVD涂层时温度高达800～
I. INTRODUCTION Chemical vapor deposition (CVD) technology and physical vapor deposition (PVD) techniques have been rapidly developed, providing new prospects for anti-friction and wear coatings. Applied to abrasive wear-based case, TiC coating is better, used in the case of abrasion, TiN coating is better, the need for high temperature stability, Al_2O_3 coating is better. CVDTiN-coated HSS tools and dies, for example, have an uncoated life of 3 to 6 times, CVD Al 2 O 3 coated cemented carbide (P30) tools, cutting cast iron and high carbon steels, respectively. 2 times the uncoated tool 10 times. Carbide CVD coating began only TiC single layer, the development of TiC-TiN double-coated and TiC-TiN-Al_2O_3 triple coating. CVD coating temperature up to 800 ~