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为提高压电微夹钳的夹持性能,设计复合控制系统对其控制.通过引入死区算子对PI模型进行改进,建立了微夹钳的迟滞模型,进而设计出其前馈控制器;对常规PID算法进行改进,设计出抛物线积分与微分先行的微夹钳PID反馈控制器;将前馈控制同PID反馈控制相结合,设计出微夹钳的复合控制器.在复合控制作用下,微夹钳达到5μm阶跃目标位移的响应时间为0.09 s,略快于前馈控制,明显快于PID反馈控制;在最大位移为15.2μm的参考输入作用下,若不考虑传感器噪声,复合控制的稳态误差几乎为0.实验结果表明,同前馈控制与PID反馈控制相比,复合控制具有良好的综合控制效果,即响应速度快、稳态精度高.
In order to improve the clamping performance of the piezoelectric microgripper, a hybrid control system is designed to control it.Improvement of the PI model by introducing the dead zone operator, the hysteresis model of the microgripper is established, and the feedforward controller is designed. This paper improves the conventional PID algorithm and designs a micro-clamp PID feedback controller with parabola integration and differential precedence. Combining the feedforward control with the PID feedback control, the micro-clamp composite controller is designed. Under the combined control, The response time of the microgripper reaching 5μm step target displacement is 0.09s, slightly faster than the feedforward control, which is obviously faster than the PID feedback control. Under the reference input whose maximum displacement is 15.2μm, if the sensor noise is not considered, the composite control The steady-state error is almost 0. Experimental results show that, compared with the feedforward control and the PID feedback control, the composite control has good comprehensive control effect, that is, the response speed is fast and the steady-state precision is high.