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本文介绍一种在10微米光谱区工作的干涉仪,它的主要用途是检验红外材料的均匀性,对红外光学系统波面进行台曼—格林检验。这种干涉仪以CO_2激光器为光源,采用衍射光栅作分光器。配有单元探测器的扫描摄相机将干涉图形显示在示波器的荧光屏上。此外,还将介绍最近与企业公司共同研制的第二代干涉仪及其典型应用,以便使人们注意到,可以把这些仪器推广应用于检验普遍的机械零件。最后介绍一种能直接获得波面的相位线性显示的实验装置,这种装置与应用光程差调制原理的红外干涉仪一起工作。
This article describes an interferometer operating in the 10-micron spectral region. Its main purpose is to verify the uniformity of the infrared material and to test the wavefront of the infrared optical system by the Taiman-Green test. This interferometer to CO_2 laser as the light source, the use of diffraction grating for the beam splitter. A scanning camera with unit detector displays the interference pattern on the oscilloscope’s screen. In addition, second-generation interferometers and their typical applications, recently developed with companies, will also be introduced to make people aware that these instruments can be widely used to test common mechanical parts. Finally, we introduce an experimental device that can directly obtain the phase linear display of wavefront. This device works with the infrared interferometer that uses the principle of optical path difference modulation.