超高真空的获得与测量技术于 195 0年左右在加拿大和美国问世。今天 ,伴随着半导体设备、平板显示器、磁和光磁存储器设备等制造业的发展 ,每隔一个月就要求推出新型有效的生产体系。在这些表面设备的生产系统中 ,许多都要求局部超高真空或要求整个工艺处理过程置于超高真空环境中。设计一个优质、高效的超高真空系统及操作工艺是达到理想效果的关键。在这里 ,我们只有科学理解气体分子和特殊表面物化结构间的相互作用 ,才能很好地解决各种工程问题。具备了关于等离子体和超高真空室壁及内部装置的表面间的相互作用的经验 ,就可以很好的解决等离子体的控制问题。近年来 ,显示器件使用的某些有机材料的开发应用 ,给超高真空技术提出了新的挑战。消费产品的大批量生产推动和改进了高效超高真空系统的设计 The acquisition and measurement of ultrahigh vacuum was introduced in Canada and the United States in about 1950. Today, along with the development of manufacturing industries such as semiconductor devices, flat panel displays, magnetic and magneto-optical memory devices, new and effective production systems are required every other month. Many of these surface equipment production systems require partial ultra-high vacuum or require the entire process to be placed in an ultra-high vacuum environment. Designing a high quality and efficient ultra-high vacuum system and operating process is the key to achieving the desired result. Here, we can only solve various engineering problems well only if we scientifically understand the interaction between gas molecules and special surface materialized structures. With plasma and ultra-high vacuum chamber wall and the internal surface of the interaction between the experience of the device, you can solve the problem of plasma control. In recent years, the development and application of some organic materials used in display devices have posed new challenges for ultra-high vacuum technology. Mass production of consumer products drives and improves the design of efficient ultra-high vacuum systems