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对适用于象增强器或者小型阴极射线管的高分辨率荧光屏进行研究时,通常需要将荧光屏与电子光学系统分开,单独测量荧光屏的调制传递函数。由于电子激发在实际测量中是必不可少的,所以,如果需要测量大量的荧光屏,就需要一种可拆卸的真空系统。将一台扫描电子显微镜与一台标准的调制传递函数测量设备组合起来,就可以满足上述要求。荧光屏位于扫描电子显微镜的取样室,一条不足2μm宽的线条被扫描电子显微镜的聚焦电子束激发,只朝着线条方向偏转。荧光屏的结构将线条质量降低,用特制的光学系统把降低了质量的线条的图象从扫描电子显微镜输送到调制传递函数分析仪。本文对确定这种系统响应的测量方法和各种荧光屏的测量结果一一作了说明。
When studying a high-resolution screen suitable for use as an image intensifier or a small cathode-ray tube, it is usually necessary to separate the screen from the electro-optical system and measure the modulation transfer function of the screen separately. Since electron excitation is essential in actual measurement, a removable vacuum system is required if a large number of fluorescent screens need to be measured. The combination of a scanning electron microscope and a standard modulation transfer function measurement device meets the above requirements. The screen is located in the scanning electron microscope sampling chamber, a line width of less than 2μm by the scanning electron microscope focused electron beam excitation, only deflected toward the direction of the line. The structure of the screen reduces the quality of the line and the image of the reduced quality line is transferred from a scanning electron microscope to a modulation transfer function analyzer using a special optics system. This article describes the measurement methods for determining the response of the system and the measurement results of various fluorescent screens.