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【摘 要】
：
Atomic hydrogen assisted molecular beam epitaxy (MBE) is a novel type of epitaxial growth of nanostructures.and the space period is around 40nm. The step arrays
【作 者】
：
【机 构】
：
State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Aca
【出 处】
：
中国物理（英文版）
【发表日期】
：
2003年2期
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