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电子枪是电子束蒸发设备的核心部件,其结构复杂,一旦出现故障,对热障涂层的制备和设备的使用都有影响。出现的故障中,以高压放电现象最为严重。结合电子束蒸发设备以及电子枪工作原理,对生产实际中出现的高压放电现象进行归纳分析,确定高压放电的产生路径,分析路径中设备高压放电现象产生的原因、绝缘类型和造成的影响,提出消除高压放电的解决方案或预防措施,以提高电子束蒸发设备的利用率。
Electron gun is the electron beam evaporation equipment core components, its structure is complex, in the event of failure, the thermal barrier coating preparation and equipment have an impact. The failure occurred, the phenomenon of high-pressure discharge is the most serious. Combined with the work principle of electron beam evaporation equipment and electron gun, the phenomenon of high-voltage discharge occurred in actual production is summarized and analyzed, the path of high-voltage discharge is determined, the cause of high-voltage discharge phenomenon of equipment in the path, the insulation type and the influence are analyzed. High-voltage discharge solutions or precautions to improve the utilization of electron beam evaporation equipment.