论文部分内容阅读
针对惯性约束聚变(ICF)驱动系统特别是其终端光学系统对元件数和元件厚度的限制要求,利用衍射光学元件(DOE)易于集成的优点,提出一种在石英基片的两面分别曝光制作色分离光栅(CSG)和光束采样光栅(BSG)的新方法,仅需一个石英片即可同时实现谐波分离和光束采样的功能.分别采用光学制版和电子束直写的方法制作了色分离光栅和光束采样光栅的掩模,并利用离子束刻蚀的方法加工了色分离光栅-光束采样光栅集成元件.结果表明,此集成元件的三倍频光能量利用率、色分离度以及采样效率等参数均与三倍频光通过色分离光栅、光束采样光栅分离元件时得到的结果相吻合,达到了惯性约束聚变激光驱动器终端光学系统的基本技术指标要求.
In order to meet the requirement of inertial confinement fusion (ICF) driving system, especially its terminal optical system, which is limited by the number of components and the thickness of the device, the advantage of easy integration of diffractive optical element (DOE) is proposed. The new method of separating the grating (CSG) and the beam sampling grating (BSG) requires only one quartz plate to realize the functions of harmonic separation and beam sampling at the same time. The color separation grating And the mask of the beam sampling grating, and the color separation grating-beam sampling grating integrated element was fabricated by the ion beam etching method.The results show that the triplet energy utilization, color separation and sampling efficiency of the integrated device The parameters are consistent with the results obtained when the third harmonic light passes through the color separation grating and the beam sampling grating separation element, which meets the basic technical specifications of the terminal optical system of the inertial confinement fusion laser driver.