一、引言近年来,随着新型固体器件的发展,离子束刻蚀技术在国内有了很大进展,相继研制出的十多台刻蚀机,已成为这方面研究的有力手段。目前,这些刻蚀机都采用低能大面积考夫曼型离子源和汕扩散泵—机械泵排气系统,用惰性气体氩气作工质,由于实验室研究的需要,工件台大多设计成多功能的。然而,从已发表的资料看,无论是刻蚀机的设计,还是工件的刻蚀试验,论及真空问题的很少,真空质量问题所造成的影响,还未受到充分的重视。 I. INTRODUCTION In recent years, with the development of new solid-state devices, ion beam etching technology has made great progress in China. More than a dozen of etching machines have been developed in succession, which have become powerful tools in this field. At present, these etching machines are using low-energy large-area Kaufman-type ion source and the diffusion pump - mechanical pump exhaust system, with inert gas argon as working fluid, due to the needs of laboratory research, most of the workpiece table design more functional. However, according to the published data, whether it is the design of the etching machine, the etching test of the workpiece or the few vacuum problems, the impact of the vacuum quality problem has not been given enough attention.