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随着红外空空导弹的发展,红外光学材料单晶硅得到了广泛的应用。介绍了单晶硅材料加工透镜的工艺过程,着重研究了硅透镜的抛光技术,通过使用不同的抛光粉及抛光模层材料,找到了加工硅透镜的最佳工艺匹配条件。实验结果表明:使用SiO2胶体配制的抛光液(PH 10￣11)及用抛光布制成的抛光模,采用机械-化学方法抛光出的零件表面疵病达到III级(GB1185-74),并能够通过修改抛光模控制光圈及光圈误差,加工出的硅透镜满足导弹光学系统的要求。
With the development of infrared air-to-air missiles, infrared optical material monocrystalline silicon has been widely used. This paper introduces the process of lens processing of single crystal silicon material, focuses on the polishing technology of silicon lens, and finds out the best process matching conditions of silicon lens by using different polishing powder and polishing mold material. The experimental results show that the surface of the part polished by mechanical-chemical method can reach Grade III (GB1185-74) by using SiO2 colloid slurry (pH 10-11) and the polishing die made of polishing cloth, and can By modifying the polishing mode control aperture and aperture error, processed silicon lens to meet the requirements of the missile optical system.