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介绍一种新型高精密长度测量仪。使用一个光学自动聚焦头和一个无齿隙机械传动机构,其分辨力可达0.1μm;在40mm 测量范围内,其绝对准确度优于1μm。由于具有自动聚焦特性,它还能在线识别表面倾角和表面曲率。
Introducing a new type of high-precision length measuring instrument. The use of an optical auto focus head and a toothless mechanical transmission with resolution up to 0.1 μm and absolute accuracy better than 1 μm over a 40 mm measurement range. It also recognizes surface inclination and surface curvature online due to its autofocusing properties.