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介绍了自主开发的基于输运理论和蒙特卡罗方法的计算离子注入射程分布的软件集成系统JTU -PRII(JiaotongUniversity -ProjectRangeIonImplantation) ,该系统整体上具有通用性、高效性和实用性 .通用性即 :该系统具有注入离子参数库和注入零件材料库的生成和调用功能 ,能计算各种注入条件下 ,包括各种注入离子 ,各种成分和形状的靶材 ,不同注入能量、注入剂量和注入角度时注入离子在靶材中的分布 ;高效性即 :由于在关键步骤中用数值拟合公式代替了数值迭代求解 ,用固定飞行路程代替随机路程 ,使计算效率大大提高 ,计算速度大大加快 ;实用性即 :由于考虑了溅射效应和靶材成分在注入过程中的动态变化 ,加之蒙特卡罗方法的固有特性 ,使计算的前提假设更接近实际 ,计算结果更加准确 .与其它著名的同类软件 ,如TRIM和SASAMAL相比 ,该软件系统界面美观 ,操作便捷 ,能动态显示中间计算结果和注入过程曲线的变化 ,可调用、计算、比较、注释、拷贝和打印各条成分分布曲线 ,计算结果与实验结果吻合得也很好 .
This paper introduces the independently developed software integration system JTU-PRII (Jiaotong University-Project Range Ion Implantation) based on transport theory and Monte Carlo method, which has the advantages of universality, efficiency and practicability as a whole, : This system has the function of generating and invoking injection ion parameter library and injection parts library, which can calculate the target of various injection conditions, including various implanted ions, various components and shapes, different injection energies, injection dosage and injection The efficiency of injecting ions into the target is high; that is, the numerical iterative solution is replaced by the numerical fitting formula in the key step and the fixed flight distance is used instead of the random route so that the computational efficiency is greatly increased and the calculation speed is greatly accelerated. Practicality means that the calculation results are more accurate due to the fact that the sputtering effect and the composition of the target material are taken into account during the injection process and the inherent characteristics of the Monte Carlo method. Software, such as TRIM and SASAMAL compared to the beautiful software interface, easy to operate, can State changes in the intermediate calculation result of the injection process and the curves can be called, calculating, comparing, comments, pieces of print copies and composition distribution curve, the calculated and experimental results agree very well.