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本文从实验上研究了国产 Zr-Al16非蒸散型吸气剂的放气特性、吸气速率及极限压力,给出了超高.极高真空状态的运转规范,首次获得了 2.6×10-10Pa 的极低压力,从而证实国产锆-铝吸气剂的性能接近国际同类产品水平。 为了更有效地使用吸气剂,本文提出了非蒸散型吸气剂的物理模型,由该模型出发推导出了表示吸气剂特性的一组方程式.运用该方程可解释实验结果及吸气剂的某些特性,同时给出部分和实验结果较好符合的理论结论。
In this paper, we study the outgassing, inspiratory rate and ultimate pressure of domestic Zr-Al16 non-evaporable getter experimentally, giving the super high. High vacuum operation specifications, for the first time won the very low pressure of 2.6 × 10-10Pa, thus confirming the performance of domestic zirconium-aluminum getter close to the level of similar products in the world. In order to use getter more effectively, a physical model of non-evaporable getter is proposed in this paper. From the model, a series of equations representing getter properties are deduced. The equation can be used to explain the experimental results and some properties of the getter. At the same time, some theoretical conclusions that accord with the experimental results are given.