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本文描述了只具有两个光电探测器而无其它光学元件的一种椭圆仪。一般说来,每个探测器都有一个部分镜面式的斜反射表面,并且产生与该表面吸收的辐射分量成比例的电信号。并不一定要求(但希望是这样)两个探测器吸收全部入射的辐射。具有平行表面或者非平行表面的两个探测器足以确定入射光相对于一组横向正交轴的线偏振度P。如果把两个平行探测器的装置围绕着入射光束以45°角转动,就测得一新的线偏振度P′。除旋光性之外,由P和P′就可完全确定入射的全部偏振光的偏振状态(一般是椭圆形的)。最后给出了这种双探测器椭圆仪(TDE)的一种校准方法。
This article describes an ellipsometer with only two photodetectors and no other optics. In general, each detector has a partially specularly angled reflective surface and produces an electrical signal proportional to the radiation absorbed by the surface. It does not necessarily (but hopefully) require that both detectors absorb the entire incident radiation. Two detectors with parallel or non-parallel surfaces are sufficient to determine the degree of linear polarization P of incident light relative to a set of transverse orthogonal axes. If two parallel detector devices are rotated around the incident beam at an angle of 45 °, a new degree of linear polarization P ’is measured. In addition to the optical rotations, the polarization state (generally oval) of all polarized light incident can be completely determined by P and P ’. Finally, a calibration method for this double detector ellipsometer (TDE) is given.