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当前,老炼仍被广泛应用于塑封微电路(PEM)的可靠性保证。为了解决老炼过程中存在的热失控及温度不一致的问题,该文设计了一套温度闭环控制系统。在由老炼箱自身装置提供箱内基础温度的基础上,设计的温度闭环控制系统以每个封装夹具内的微环境为控制对象,采用模糊自适应算法,最优配置比例积分(PI)控制器的控制参数,最终驱动执行器,对被老炼器件及时加热或散热。通过试验证实,老炼过程中加入温度闭环控制系统后,被测器件的温度在更短的时间内(20min)达到稳态,稳态精度控制在1℃以内,且被测器件温度的差异由2℃降低到基本一致。而后,当系统采用模糊自适应控制算法后,系统的动态响应时间更短,抗干扰能力更强。因此,该系统达到了防止器件热失控及保证不同器件间温度一致的目的。
Currently, aging is still widely used in plastic micro-circuit (PEM) reliability assurance. In order to solve the problem of thermal runaway and temperature inconsistency in the aging process, a set of temperature closed-loop control system was designed. Based on the basic temperature inside the box provided by the old refill box, the closed-loop temperature control system is designed to control the micro-environment within each package fixture using fuzzy adaptive algorithm and optimally proportional control (PI) Control parameters of the device, the final drive actuator, on the aging device is timely heating or cooling. It is confirmed through experiments that when the closed-loop temperature control system is added in the aging process, the temperature of the device under test reaches a steady state in a shorter time (20min), the steady-state accuracy is controlled within 1 ℃, and the temperature difference of the device under test is controlled by 2 ℃ reduced to basically the same. Then, when the system adopts fuzzy adaptive control algorithm, the system has shorter dynamic response time and stronger anti-interference ability. Therefore, the system achieves the goal of preventing thermal runaway of the device and ensuring the temperature uniformity between different devices.