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微转子是微机电系统(MEMS)的一个重要组成部分。为了能够设计、驱动具有复杂形貌的微转子,对其所受的光驱动力矩的光波动模型计算方法进行了研究。使用时域有限差分法分析微转子在光阱中散射光场的电磁场量,根据麦克斯韦尔力学张量方程得到微转子表面所受的力。最后,应用牛顿方程计算出其相应的旋转力矩和转速等信息。用基于此方法编写的模块化Matlab程序分析计算了一个本文设计制造的微转子,并与实验进行了比较,结果与200 r/min相符,表明此方法基本满足复杂形貌微转子驱动力计算要求,对设计微转子有着很好的应用前景。
Micro-rotor MEMS is an important part of the system. In order to be able to design and drive the micro-rotor with complex morphology, the calculation method of the light fluctuation model of the light driving moment suffered by it is studied. The time-domain finite difference method was used to analyze the electromagnetic field of the micro-rotor scattering light field in the light trap. The force on the micro-rotor surface was obtained according to the Maxwell mechanical tensor equation. Finally, the application of Newton’s equation to calculate the corresponding torque and speed and other information. A micro-rotor designed and manufactured by this paper was analyzed and calculated with a modular Matlab program based on this method and compared with the experiment. The result is in agreement with 200 r / min, which shows that this method basically meets the computational requirements of micro-rotor driving force with complex morphology , Has very good application prospect to design micro-rotor.