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广义上的MEMS技术已经跨越了两个世纪,从最早的照相制版应用到现在的各种加速度传感器应用,在它的发展过程中不断吸收了各种优秀的技术。其
MEMS technology in the broad sense has spanned two centuries, from the earliest photolithography applications to the current variety of acceleration sensor applications, in the course of its development has been absorbing a variety of excellent technology. its