【摘 要】
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This paper presents a novel high-voltage lateral double diffused metal-oxide semiconductor (LDMOS) with selfadaptive interface charge (SAC) layer and its physic
【机 构】
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State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Scienc
【出 处】
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Chinese Physics B
论文部分内容阅读
This paper presents a novel high-voltage lateral double diffused metal-oxide semiconductor (LDMOS) with selfadaptive interface charge (SAC) layer and its physical model of the vertical interface electric field.The SAC can be self-adaptive to collect high concentration dynamic inversion holes,which effectively enhance the electric field of dielectric buried layer (E I) and increase breakdown voltage (BV).The BV and E I of SAC LDMOS increase to 612 V and 600 V/μm from 204 V and 90.7 V/μm of the conventional silicon-on-insulator,respectively.Moreover,enhancement factors of η which present the enhanced ability of interface charge on E I are defined and analysed.
This paper presents a novel high-voltage lateral double diffused metal-oxide semiconductor (LDMOS) with selfadaptive interface charge (SAC) layer and its physical model of the vertical interface electric field. The SAC can be self-adaptive to collect high concentration dynamic inversion The BV and EI of SAC LDMOS increase to 612 V and 600 V / μm from 204 V and 90.7 V / μm of the conventional silicon-on-insulator, respectively. Moreover, enhancement factors of η which present the enhanced ability of interface charge on EI are defined and analyzed.
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