从理论上重点分析和研究了器件行波电极的微波特性，在半绝缘ＧａＡｓ衬底上设计了具有ｎ＋重掺杂外延层和共平面电极的ＧａＡｓ／ＧａＡｌＡｓ定向耦合器型行波调制器。针对实验中发现的行波电极上微波的高传输损耗问题，分析了起因并提出了器件的改进设计方案，从而设计出可达到３５ＧＨｚ带宽的高速调制效应的光波导调制器 The microwave characteristics of the traveling wave electrodes are analyzed and studied theoretically. A GaAs / GaAlAs directional coupler type traveling wave modulator with n + heavily doped epitaxial layers and coplanar electrodes is designed on semi-insulating GaAs substrates. Aiming at the high transmission loss of microwaves found on the traveling wave electrodes, the cause of the high transmission loss and the improved design scheme of the device are proposed. The design of an optical waveguide modulator with high speed modulation effect of 35GHz bandwidth