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装置是由配有微机的快速扫描分光光度计组成,在镀膜时不断测量膜层的光谱透射率曲线以监控膜厚,并作了监控三层膜的试验。 装置的性能:测量波长宽度333nm;波长点数:50点;透射率精度:±1％;光谱透射率扫描速度:12c/s。
The device is composed of a fast scanning spectrophotometer equipped with a microcomputer. During the coating, the spectral transmittance curve of the coating is continuously measured to monitor the thickness of the coating, and a test for monitoring the three-layer coating is made. Device performance: measuring wavelength width 333nm; wavelength points: 50 points; transmittance accuracy: ± 1%; spectral transmittance scanning speed: 12c / s.