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原子力显微镜(atomic force microscope,AFM)纳米沉积加工是一种重要的纳米焊接手段,其加工机理存在场致蒸发和热致蒸发两种可能.为明确AFM沉积加工的机理,本文通过仿真研究了AFM纳米沉积加工过程中的温度变化,分析了加工电流的波形和空气介质对沉积的影响,并在此基础上建模,分别研究瞬态电流和稳态电流引起的温度变化.通过仿真发现,沉积中温度确有上升,但远没有达到引起热蒸发的程度.验证了AFM纳米沉积加工是基于场蒸发的原理.
Atomic force microscope (AFM) nanoflow deposition is an important means of nano-welding, and its processing mechanism has field-evaporation and thermal-induced evaporation.To clarify the mechanism of AFM deposition processing, AFM The variation of temperature during the process of nano-deposition was analyzed, and the waveform of processing current and the influence of air medium on deposition were analyzed. Based on this, the modeling of temperature and the change of temperature caused by steady current were studied respectively. The temperature did rise but was far below the level that caused thermal evaporation, confirming that AFM nanoflow processing is based on the principle of field evaporation.