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介绍了一种基于热学知识设计的表面薄膜微型MEMS皮拉尼计,并将其用于圆片级真空封装腔体的真空度测量中。为了设计灵敏度较高的皮拉尼计,对不同结构的皮拉尼计的热量分布进行了数值计算与分析,并最终完成了加工。此皮拉尼计的结构和加工工艺比较简单,能用于一般的MEMS真空封装中。实验结果显示该皮拉尼计可以测量1～10~5Pa的真空度,并在1～1000Pa内有很好的线性度。
A kind of miniature MEMS Piraniometer based on thermal knowledge is introduced and used in the vacuum measurement of the wafer level vacuum packaging chamber. In order to design the Pirani meter with higher sensitivity, the calorific distribution of the Pirani meter with different structures was numerically calculated and analyzed, and finally the machining was completed. This Pirani meter structure and processing technology is relatively simple, can be used in the general MEMS vacuum package. The experimental results show that the Pirani meter can measure the vacuum of 1 ~ 10 ~ 5Pa and has good linearity in 1 ~ 1000Pa.